Parallel, individually addressable probes for nanolithography

Details Parallel, individually addressable probes for nanolithography Parallel, individually addressable probes for nanolithography

2008-07-22

2008-07-22

Luu, Chuong A. (Department: 2892)

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Charge transfer device

C257S444000, C257S234000, C257S431000

Reexamination Certificate

active

11073938

ABSTRACT:
A microfabricated probe array for nanolithography and process for designing and fabricating the probe array. The probe array consists of individual probes that can be moved independently using thermal bimetallic actuation or electrostatic actuation methods. The probe array can be used to produce traces of diffusively transferred chemicals on the substrate with sub-1 micrometer resolution, and can function as an arrayed scanning probe microscope for subsequent reading and variation of transferred patterns.

REFERENCES:
patent: 6642129 (2003-11-01), Liu et al.
patent: 6827979 (2004-12-01), Mirkin et al.
patent: 6862921 (2005-03-01), Chand et al.

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