Panels for pulse tube cryopump

Details Panels for pulse tube cryopump Panels for pulse tube cryopump

2007-04-10

2007-04-10

Doerrier, William C. (Department: 3744)

Refrigeration

Low pressure cold trap process and apparatus

C062S006000

Reexamination Certificate

active

10500785

ABSTRACT:
The pulse tubes (165, 175) and regenerators (160, 170) contained within a cryopump housing (210) are arranged in a way that facilitates the fabrication and installation of the cryopanels (265). The pulse tubes and regenerators are located in a common plane in the center of the cryopump housing and the cold (second stage) panels (265) that are pitched parallel to the plane with the tubes.

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patent: 4966016 (1990-10-01), Bartlett
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patent: 5443548 (1995-08-01), Saho et al.
patent: 6230499 (2001-05-01), Hohne
patent: 6293109 (2001-09-01), Miyamoto et al.
patent: 2001/0025494 (2001-10-01), Okamura et al.
patent: 10-184540 (1998-07-01), None

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