Paddle for securely mounting a wafer cassette holder thereto

Details Paddle for securely mounting a wafer cassette holder thereto Paddle for securely mounting a wafer cassette holder thereto

2002-07-03

2010-10-12

Wood, Kimberly T (Department: 3632)

Special receptacle or package

Holder for a removable electrical component

For a semiconductor wafer

C248S678000, C248S680000, C248S346030, C206S711000, C269S302100, C414S941000, C414S937000

Reexamination Certificate

active

07810645

ABSTRACT:
A platform for securely mounting a wafer cassette holder thereon is provided which includes a wafer cassette holder that has a flat bottom surface and four sidewall panels, a platform that has a flat top surface larger than and for mating to the flat bottom surface of the wafer cassette holder, And a securing device mounted in the flat top surface of the platform juxtaposed to each side of the four sidewalls of the wafer cassette holder for preventing the holder from accidentally slipping off the platform, the securing device may include either a plurality of engagement pins that slidingly engages the wafer cassette holder for securely holding the holder on the platform, or a plurality of side panels mounted along the peripheral edge of the platform for preventing the holder from slipping off the platform.

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