Chemistry: electrical and wave energy – Apparatus – Electrolytic
Reexamination Certificate
2008-05-27
2008-05-27
Tsang-Foster, Susy (Department: 1795)
Chemistry: electrical and wave energy
Apparatus
Electrolytic
C204S217000, C204S22400M, C204S22400M, C204S279000, C205S093000, C205S662000, C451S527000
Reexamination Certificate
active
07378004
ABSTRACT:
An apparatus capable of assisting in controlling an electrolyte flow and an electric field distribution used for processing a substrate is provided. It includes a rigid member having a top surface of a predetermined shape and a bottom surface. The rigid member contains a plurality of channels, each forming a passage from the top surface to the bottom surface, and each allowing the electrolyte and electric field flow therethrough. A pad is attached to the rigid member via a fastener. The pad also allows for electrolyte and electric field flow therethrough to the substrate.
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Basol Bulent
Talieh Homayoun
Uzoh Cyprian
Knobbe Martens Olson & Bear LLP
Leader William T.
Novellus Systems Inc.
Tsang-Foster Susy
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