Abrading – Precision device or process - or with condition responsive... – Computer controlled
Reexamination Certificate
2005-11-01
2005-11-01
Nguyen, George (Department: 3723)
Abrading
Precision device or process - or with condition responsive...
Computer controlled
C451S056000, C451S072000, C451S443000
Reexamination Certificate
active
06960114
ABSTRACT:
A pad conditioner of wafer planarization equipment includes a linear driving device for moving a disk holder up and down using a magnetic force. The linear driving device has an electromagnet, a permanent magnet, and a controller. The controller controls the power supplied to the electromagnet such that the electromagnet and permanent magnet produce a force of attraction and/or repulsion used to move the disk holder relative to a polishing pad of the wafer planarization equipment.
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patent: 2000-18620 (2000-04-01), None
Nguyen George
Volentine Francos & Whitt PLLC
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