Pad backer and CMP process using the same

Details Pad backer and CMP process using the same Pad backer and CMP process using the same

2006-05-23

2006-05-23

Ackun, Jr., Jacob K. (Department: 3723)

Abrading

Abrading process

Glass or stone abrading

C451S288000, C451S490000

Reexamination Certificate

active

07048615

ABSTRACT:
A pad backer is described, comprising a backing plate, an elastomer layer and a pad backing ring. The elastomer layer has a bottom surface bonded to the backing plate and an upper surface with a protrudent part at the edge portion thereof. The pad backing ring has an inner bottom surface with a recessed part thereon matching with the protrudent part on the upper surface of the elastomer layer, such that the elastomer layer is fixed onto the pad backing ring through engagement of the protrudent part and the recessed part.

REFERENCES:
patent: 5931719 (1999-08-01), Nagahara et al.
patent: 6095900 (2000-08-01), Fruitman et al.
patent: 6336851 (2002-01-01), Shendon
patent: 6390891 (2002-05-01), Guha et al.
patent: 2003/0110609 (2003-06-01), Taylor
patent: 2003/0228836 (2003-12-01), Lombardo et al.
patent: 2004/0072502 (2004-04-01), Taylor

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