Abrading – Machine – Rotary tool
Reexamination Certificate
2005-07-26
2005-07-26
Ackun, Jr., Jacob K. (Department: 3723)
Abrading
Machine
Rotary tool
C451S289000
Reexamination Certificate
active
06921324
ABSTRACT:
A pad backer is described, comprising a backing plate, an elastomer layer and a pad backing ring. The elastomer layer has a bottom surface bonded to the backing plate and an upper surface with a protrudent part at the edge portion thereof. The pad backing ring has an inner bottom surface with a recessed part thereon matching with the protrudent part on the upper surface of the elastomer layer, such that the elastomer layer is fixed onto the pad backing ring through engagement of the protrudent part and the recessed part.
REFERENCES:
patent: 5931719 (1999-08-01), Nagahara et al.
patent: 6095900 (2000-08-01), Fruitman et al.
patent: 6336851 (2002-01-01), Shendon
patent: 6390891 (2002-05-01), Guha et al.
patent: 2003/0110609 (2003-06-01), Taylor
patent: 2003/0228836 (2003-12-01), Lombardo et al.
patent: 2004/0072502 (2004-04-01), Taylor
Chang Li-Min
Huang Justin
Liao Tony
Pao C. W.
Ackun Jr. Jacob K.
Jianq Chyun IP office
United Microelectronics Corp.
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