Pad array semiconductor device with thermal conductor and proces

Electricity: electrical systems and devices – Housing or mounting assemblies with diverse electrical... – For electronic systems and devices

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165 803, 165185, 174 163, 257712, H05K 720

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active

052853527

ABSTRACT:
A pad array semiconductor device (35) includes a thermal conductor (28) integrated into a circuitized substrate (14). A semiconductor die (12) is mounted on the substrate overlying the thermal conductor to establish a thermal path away from the die. The thermal conductor may also be covered or surrounded by a metallized area (37, 39), which together may serve as a ground plane in the device. Preferably one or more terminals (26) are attached to the thermal conductor for improved thermal and electrical performance. One method of integrating the thermal conductor in the substrate is to position a metal plug into an opening 30 of the substrate. The plug is then compressed or otherwise plastically deformed to fill the opening and create a substantially planar substrate surface.

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Cherniack et al "Microcircuit Heat Sink", IBM Technical Disclosure Bulletin, vol. 8, No. 10, Mar. 1966, p. 1457.

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