Packaging substrate and manufacturing method thereof,...

Semiconductor device manufacturing: process – Packaging or treatment of packaged semiconductor – Assembly of plural semiconductive substrates each possessing...

Reexamination Certificate

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C438S120000

Reexamination Certificate

active

07132310

ABSTRACT:
A basic portion layer21of a substrate electrode12aconnected to a projecting electrode13electrically and mechanically on a substrate member of ceramics. The substrate member on which the basic portion layer21is formed is subjected to sintering. A surface of the basic portion layer21in the sintered substrate member is polished. On the polished basic portion layer21, the plating layers22, 23are formed, so that surface roughness of the substrate electrode12amay be, for example, not larger than 0.1 μmRMS. Accordingly, junction strength of an integrated circuit element mounted on a packaging substrate by a flip-chip method can be improved.

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patent: 2004/0108560 (2004-06-01), Taga

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