Packaged microelectromechanical device with lubricant

Active solid-state devices (e.g. – transistors – solid-state diode – Housing or package – With desiccant – getter – or gas filling

Reexamination Certificate

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Details

C257S721000, C438S115000, C438S116000

Reexamination Certificate

active

06979893

ABSTRACT:
The present invention provides a lubricant container inside a microelectromechanical device package. The lubricant container contains selected lubricant that evaporates from the container and contact to a surface of the microelectromechanical device for lubricating the surface.

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