Active solid-state devices (e.g. – transistors – solid-state diode – Housing or package – With desiccant – getter – or gas filling
Reexamination Certificate
2005-12-27
2005-12-27
Le, Dung A. (Department: 2818)
Active solid-state devices (e.g., transistors, solid-state diode
Housing or package
With desiccant, getter, or gas filling
C257S721000, C438S115000, C438S116000
Reexamination Certificate
active
06979893
ABSTRACT:
The present invention provides a lubricant container inside a microelectromechanical device package. The lubricant container contains selected lubricant that evaporates from the container and contact to a surface of the microelectromechanical device for lubricating the surface.
REFERENCES:
patent: 5287096 (1994-02-01), Thompson et al.
patent: 5411769 (1995-05-01), Hornbeck
patent: 5447600 (1995-09-01), Webb
patent: 5512374 (1996-04-01), Wallace et al.
patent: 5610438 (1997-03-01), Wallace et al.
patent: 5694740 (1997-12-01), Martin et al.
patent: 5835256 (1998-11-01), Huibers
patent: 5936758 (1999-08-01), Fisher et al.
patent: 5939785 (1999-08-01), Klonis et al.
patent: 6046840 (2000-04-01), Huibers
patent: 6086726 (2000-07-01), Renk et al.
patent: 6204085 (2001-03-01), Strumpell et al.
patent: 6259551 (2001-07-01), Jacobs
patent: 6300294 (2001-10-01), Robbins et al.
patent: 6475570 (2002-11-01), Jacobs
patent: 6664779 (2003-12-01), Lopes et al.
patent: 6844959 (2005-01-01), Huibers et al.
patent: 6867897 (2005-03-01), Patel et al.
patent: 2002/0056898 (2002-05-01), Lopes et al.
patent: 2002/0063322 (2002-05-01), Robbins et al.
patent: 2003/0002019 (2003-01-01), Miller
patent: 2003/0064149 (2003-04-01), Miller
patent: 2004/0012838 (2004-01-01), Huibers
patent: 2004/0100594 (2004-05-01), Huibers et al.
patent: 2004/0100677 (2004-05-01), Huibers et al.
patent: 2004/0125346 (2004-07-01), Huibers
patent: 2004/0156090 (2004-08-01), Patel et al.
“Lubrication of Digital Micromirror Devices” Henck, Tribology Letters 3 (1997) 239-247.
Micromotor Operation in a Liquid Environment Dhuler, IEEE 1992 pp. 10-13.
“Optimization of Lubricants fir silica Micromotors” Zarrd, Sensors and Actuators A 46-47 (1995) 598-600.
“Fabrication of packaged thin beam structures by an improved driving method”Masato Ohtsu, IEEE (1996) 0-7803-2985-6, pp. 228-233.
“Operation of electrostatic micromotors in liquid environments” Mehran Mehregany, J. Micromech. Microeng. 2 (1992) 1-3.
“Nanotribology and nanomechanics of MEMS devices”, Nharad Bhushan, IEEE0-7803-298-5-6, pp. 91-98.
“Micromotor dynamics in lubricating fluids”Keren Deng, J. Micromech. Microeng. 4 (1994) 266-269.
“Stiction reduction processes for surface mciromachines” Roya Maboudian Tribology letters 3 (1997) 215-221.
“Friction and Pull-off Force on Silicon Surface Modified by FIB” Ando IEEE 1996, 0-7803-2985-6/96, pp. 349-353.
“Measurement of Micromoto Dynamics in Lubricating Fluids” Deng IEEE.
“Friction and Wear studies on Lubricants and materials Applicable to MEMS” Shigehisa Suzuki, IEEE 1991, pp. 143-147.
W. Robert Ashurst, et al., Wafer Level Anti-Stiction Coatings for MEMS., Sensors and Actuators A 104 (2003), pp. 213-221.
W. Robert Ashurst et al., Vapor Phase Anti-Stiction Coatings for MEMS, pp. 1-6.
W. Robert Ashurst, et al., Nanometer-Thin Titania Films with Sam-Level Sticktion and Superior Wear Resisitance for Reliable MEMS Performance, 4 pgs.
B.C. Bunker, et al., The Impact of Solution Agglomeration on the Deposition of Self-Assembled Monolayers, 2000 American Chemical Society, pp. 7742-7751.
W. Robert Ashurst, et al., Alkene Based Monolayer Films as Anti-Stiction Coatings for Polysilicon MEMS, Berkeley Sensor & Actuator Center, 4 pgs.
S Imad-Uddin Ahmed, et al., Using Self Assembled Monolayers to Reduce Friction and Wear in Polysilicon Based MEMS, 2000, pp. 1-18.
Uthara Srinivasan, et al., Self Addressed Fluorocarbon Films for Enhanced Stiction Reduction, 1997 ieee, pp. 1399-1402.
Dunphy Jim
Porter John
Simonian Dmitri
Muir Gregory R.
Reflectivity, Inc
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