Package structure of semiconductor and wafer-level formation...

Semiconductor device manufacturing: process – Bonding of plural semiconductor substrates

Reexamination Certificate

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C438S108000, C438S109000

Reexamination Certificate

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11164818

ABSTRACT:
In wafer-level formation of a package structure of semiconductor, multitudes of conductive connection structures are formed protruded from a transparent substrate. Multitudes of grooves are formed in a semiconductor wafer and an adhesive is filled therein. The wafer and the transparent substrate are jointed in which each of the conductive connection structures are positioned in one of the grooves and exposed outside of another surface of the semiconductor wafer. A package structure is obtained by sawing the wafer and has electrical connection between the signals of the active side and back side through the conductive connection structures.

REFERENCES:
patent: 5611140 (1997-03-01), Kulesza et al.
patent: 5966593 (1999-10-01), Budnaitis et al.
patent: 6022761 (2000-02-01), Grupen-Shemansky et al.
patent: 2003/0087475 (2003-05-01), Sterrett et al.

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