Semiconductor device manufacturing: process – Bonding of plural semiconductor substrates
Reexamination Certificate
2007-07-03
2007-07-03
Doan, Theresa (Department: 2814)
Semiconductor device manufacturing: process
Bonding of plural semiconductor substrates
C438S108000, C438S109000
Reexamination Certificate
active
11164818
ABSTRACT:
In wafer-level formation of a package structure of semiconductor, multitudes of conductive connection structures are formed protruded from a transparent substrate. Multitudes of grooves are formed in a semiconductor wafer and an adhesive is filled therein. The wafer and the transparent substrate are jointed in which each of the conductive connection structures are positioned in one of the grooves and exposed outside of another surface of the semiconductor wafer. A package structure is obtained by sawing the wafer and has electrical connection between the signals of the active side and back side through the conductive connection structures.
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patent: 6022761 (2000-02-01), Grupen-Shemansky et al.
patent: 2003/0087475 (2003-05-01), Sterrett et al.
Hsiao Wei-Min
Yang Kuo-Pin
Advanced Semiconductor Engineering Inc.
Doan Theresa
Harding Sarah K.
Hsu Winston
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