Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal
Reexamination Certificate
2011-03-01
2011-03-01
Smith, Bradley K (Department: 2894)
Active solid-state devices (e.g., transistors, solid-state diode
Responsive to non-electrical signal
C257S415000, C257S698000, C257SE23190, C257SE29324, C438S051000, C438S125000
Reexamination Certificate
active
07898043
ABSTRACT:
A package includes a substrate provided with a passing opening and a MEMS device. The MEMS device includes an active surface wherein a portion of the MEMS device is integrated sensitive to the chemical/physical variations of a fluid. The active surface of the MEMS device faces the substrate and is spaced therefrom, the sensitive portion being aligned to the passing opening. A protective package incorporates the MEMS device and the substrate, leaving at least the sensitive portion of the MEMS device exposed through the passing opening of the substrate.
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Fontana Fulvio Vittorio
Shaw Mark
Ziglioli Federico Giovanni
Graybeal Jackson LLP
Jablonski Kevin D.
Jorgenson Lisa K.
Smith Bradley K
STMicroelectronics S.r.l.
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