Single-crystal – oriented-crystal – and epitaxy growth processes; – Forming from vapor or gaseous state – Using an energy beam or field – a particle beam or field – or...
Reexamination Certificate
2005-05-24
2005-05-24
Norton, Nadine G. (Department: 1765)
Single-crystal, oriented-crystal, and epitaxy growth processes;
Forming from vapor or gaseous state
Using an energy beam or field, a particle beam or field, or...
C117S088000, C428S688000, C428S702000, C423S099000
Reexamination Certificate
active
06896731
ABSTRACT:
The present invention provides a low-resistivity p-type single-crystal zinc oxide. An n-type dopant and p-type dopant are doped into zinc oxide with higher concentration of the p-type dopant than that of the n-type dopant during forming a single-crystal of the zinc oxide through a thin film forming process. Further, an element of the second group is co-doped to allow oxygen to be stabilized.
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Yamamoto Tetsuya
Yao Takafumi
Yoshida Hiroshi
Anderson Matthew
Japan Science and Technology Corp.
Norton Nadine G.
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