P.sub.4 gas generator using the alkali metal polyphosphide MP.su

Details P.sub.4 gas generator using the alkali metal polyphosphide MP.su P.sub.4 gas generator using the alkali metal polyphosphide MP.su

1985-03-13

1987-06-02

Heller, Gregory A.

Chemistry of inorganic compounds

Phosphorus or compound thereof

Elemental phosphorus

423299, C01B 2501, C01B 2502, C01B 2504

Patent

active

046702415

ABSTRACT:
MP.sub.15, where M is an alkali metal is used in a generator of P.sub.4 gas. KP.sub.15 is preferred. The generator is heated to produce the P.sub.4 gas. The generator may be used in various deposition processes such as chemical vapor deposition, vacuum evaporation, and molecular beam deposition. It is particularly useful in high vacuum processes below 10.sup.-3 Torr, particularly below 10.sup.-4 Torr such as vacuum evaporation and molecular beam deposition, for example vapor phase epitaxy and molecular beam epitaxy.

REFERENCES:
patent: 2860037 (1958-04-01), Kamlet
patent: 3088807 (1963-05-01), Williams
patent: 3366447 (1968-01-01), Suriani

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