P-N junction diffusion barrier employing mixed dopants

Active solid-state devices (e.g. – transistors – solid-state diode – Heterojunction device – Bipolar transistor

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257751, 257603, 257607, H01L 29227, H01L 2973, H01L 2990

Patent

active

053878078

ABSTRACT:
Generally, and in one form of the invention, a p-n junction diffusion barrier is disclosed comprising a first semiconductor layer 28 of p-type conductivity, a second semiconductor layer 32 of n-type conductivity and a third semiconductor layer 30 of p-type conductivity disposed between the first and second layers, the third layer being doped with a relatively low diffusivity dopant in order to form a diffusion barrier between the first and the second semiconductor layers.

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W. S. Hobson, et al., "Carbon-Doped Base GaAs-AlGaAs HBT's Grown by MOMBE and MOCVD Regrowth," IEEE Electron Device Letters, vol. 11, No. 6, Jun. 1990, pp. 241-243.
S. Strite, et al., "Si as a Diffusion Barrier for Ge/GaAs Heterojunctions," Applied Physics Letters, vol. 56, No. 17, 23 Apr. 1990, pp. 1673-1675.
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