Ozonizer

Details Ozonizer Ozonizer

1995-08-23

1998-08-11

Jordan, Charles T.

Chemical apparatus and process disinfecting, deodorizing, preser

Chemical reactor

With means applying electromagnetic wave energy or...

42218607, B01J 1908

Patent

active

057941149

ABSTRACT:
In an improved ozonizer, at least those parts of an ozone gas delivery path located downstream of an ozone generating cell which are to come into contact with ozone gas are either composed of or coated with at least one ozone-resistant, Cr-free material selected from among aluminum (Al), an aluminum alloy, Teflon, fluorinated nickel, a nickel alloy, a silicon oxide based glass and a high-purity aluminium oxide. The ozonizer is capable of producing ozone that is not contaminated with Cr compounds at all or which is insufficiently contaminated to cause any practical problem in the fabrication of highly integrated semiconductor devices.

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Grant and Hackh's Chemical Dictionary, 5th ed., McGraw and Hill, New York, 1987, p. 553, 1987 No Month Available.

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