Ozone flow rate control device

Details Ozone flow rate control device Ozone flow rate control device

1998-06-05

2000-05-23

Michalsky, Gerald A.

Fluid handling

With heating or cooling of the system

With electric heating element

1374875, F16K 4900

Patent

active

060654899

ABSTRACT:
An ozone flow rate control device for controlling a flow rate of ozone gas supply, according to the present invention, comprises an inlet pipe to which the ozone gas is supplied, a bypass pipe and a sensor pipe branched from the inlet pipe, a control signal generator circuit for measuring a variation of temperature of the sensor pipe and generating a control signal corresponding to a flow rate of the ozone gas, an outlet pipe connected to the bypass pipe and the sensor pipe, a valve provided in the outlet pipe and having an opening controlled correspondingly to the control signal and heating means for heating the ozone gas supplied to the sensor pipe to a predetermined temperature.

REFERENCES:
"Excalibur Gas Processing System Operation and Maintenance" prepared by the Technical Documentation Department of FSI International, Jan. 1989, pp. x, 1-3 to 1-5, and 3-9.

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