Ozonated water flow and concentration control method

Details Ozonated water flow and concentration control method Ozonated water flow and concentration control method

2005-09-27

2005-09-27

Hruskoci, Peter A. (Department: 1724)

Cleaning and liquid contact with solids

Processes

Including application of electrical radiant or wave energy...

C134S026000, C134S902000, C210S752000, C210S760000

Reexamination Certificate

active

06948504

ABSTRACT:
The invention features an apparatus and a method for supplying ozonated water to more than one process tool. Ozonated water of a first concentration received from an ozonated water generator and water received from a source are mixed to produce ozonated water of a second concentration. The ozonated water of a second concentration is supplied to a first process tool. Ozonated water from the ozonated water generator is supplied to a second process tool while supplying the ozonated water of the second concentration to the first process tool.

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International Search Report for International Patent Application No. PCT/US03/12973, dated Apr. 25, 2003, 10 pages.

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