Liquid purification or separation – Flow – fluid pressure or material level – responsive – Proportionate feed means
Reexamination Certificate
2007-08-07
2009-11-24
Hruskoci, Peter A (Department: 1797)
Liquid purification or separation
Flow, fluid pressure or material level, responsive
Proportionate feed means
C134S05600D, C134S902000, C156S345130, C210S143000, C210S199000
Reexamination Certificate
active
07622037
ABSTRACT:
The invention features an apparatus and a method for supplying ozonated water to more than one process tool. Ozonated water of a first concentration received from an ozonated water generator and water received from a source are mixed to produce ozonated water of a second concentration. The ozonated water of a second concentration is supplied to a first process tool. Ozonated water from the ozonated water generator is supplied to a second process tool while supplying the ozonated water of the second concentration to the first process tool.
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International Search Report for International Patent Application No. PCT/US03/12973, dated Apr. 25, 2003, 10 pages.
Fittkau Jens
Gottschalk Christiane
Seiwert Johannes
Hruskoci Peter A
MKS Instruments Inc.
Proskauer Rose LLP
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