Oxynitride piezoelectric material and method of producing...

Details Oxynitride piezoelectric material and method of producing... Oxynitride piezoelectric material and method of producing...

2011-04-26

2011-04-26

Lorengo, Jerry (Department: 1731)

Compositions

Piezoelectric

C252S06290R, C501S136000

Reexamination Certificate

active

07931821

ABSTRACT:
An oxynitride piezoelectric material, which exhibits ferroelectricity and has good piezoelectric properties, and a method of producing the oxynitride piezoelectric material. The oxynitride piezoelectric material includes a tetragonal perovskite-type oxynitride represented by the following general formula (1):in-line-formulae description="In-line Formulae" end="lead"?A1−xBix+δ1B1−yB′y+δ2O3−zNz  (1),in-line-formulae description="In-line Formulae" end="tail"?where A represents a divalent element, B and B′ each represent a tetravalent element, x represents a numerical value of 0.35 or more to 0.6 or less, y represents a numerical value of 0.35 or more to 0.6 or less, z represents a numerical value of 0.35 or more to 0.6 or less, and δ1 and δ2 each represent a numerical value of −0.2 or more to 0.2 or less, in which the A includes at least one kind selected from Ba, Sr, and Ca and the B and the B′ each include at least one kind selected from Ti, Zr, Hf, Si, Ge, and Sn.

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Razvan Caracas et al., “Prediction of Polar Ordered Oxynitride Perovskites,” Appl. Phys. Lett. 91, 092902 (Aug. 2007).

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