Oxygen sensor with heater

Chemistry: electrical and wave energy – Apparatus – Electrolytic

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Details

204408, 204426, 204429, G01N 2758

Patent

active

045004129

ABSTRACT:
A sensor which has an insulating substrate on which is formed a heater layer for heating the sensor on a part thereof and which is operated above a predetermined temperature. The heater layer is made of a material which has a thickness of 0.2 .mu.m to 20 .mu.m and which is made of platinum, rhodium, palladium or a mixture thereof. The insulating substrate is made of alumina, quartz, spinel, magnesia, zirconia, or mixtures thereof. A heater protective layer having a thickness of 0.01 .mu.m to 500 .mu.m is made of materials based on alumina, silica, spinel, magnesia, zirconia or mixtures thereof.

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patent: 4071817 (1978-01-01), Bahl
patent: 4107019 (1978-08-01), Takao et al.
patent: 4277323 (1981-07-01), Muller et al.
patent: 4304652 (1981-12-01), Chiba et al.
patent: 4347114 (1982-08-01), Kimura et al.
patent: 4365604 (1982-12-01), Sone
patent: 4407704 (1983-10-01), Mase et al.

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