Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Patent
1982-05-27
1984-05-22
Miller, J. D.
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
29 2535, 174137A, 310340, 333154, 427 38, H03H 942
Patent
active
044503741
ABSTRACT:
Passivated and low scatter acoustic wave devices comprise surface acoustic wave (SAW) and shallow bulk acoustic wave (SBAW) devices having transducers composed of oxidizable metal and layers of metal oxide on conventional acoustic wave substrates. Passivated transducers are achieved by forming a layer of oxide on an existing transducer. The method may be used to passivate a device packaged in a non-oxidizable package with oxidizable wire leads, thus combining complete protection with efficient manufacturing operations. Low scatter SAW transducers are achieved by forming the transducer and the interstitial insulating layer from a single layer of oxidizable metal by means of masking and oxidation operations.
REFERENCES:
patent: 2030937 (1936-02-01), Reichmann
patent: 2161636 (1939-06-01), Rankin et al.
patent: 2837619 (1958-06-01), Stein
patent: 4130771 (1978-12-01), Bottom
patent: 4239553 (1980-12-01), Barnett et al.
patent: 4323589 (1982-04-01), Ray et al.
patent: 4357369 (1982-11-01), Kilichowski et al.
Cho Frederick Y.
Hickernell Fred S.
Meyer Jonathan P.
Miller J. D.
Motorola Inc.
Parsons Eugene A.
Rebsch D. L.
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