Oxygen glow treating of ZnO electrode for thin film silicon sola

Details Oxygen glow treating of ZnO electrode for thin film silicon sola Oxygen glow treating of ZnO electrode for thin film silicon sola

1988-11-18

1989-10-10

Silverman, Stanley

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

156634, 70419235, 427331, B05D 306

Patent

active

048731188

ABSTRACT:
An improved method for making solar cells of the type wherein a thin film silicon hydrogen alloy structure is deposited upon a transparent zinc oxide conductive film. Before deposition of the TFS film, the zinc oxide film is treated with a glow discharge comprising oxygen.

REFERENCES:
patent: 2841477 (1958-07-01), Hull
patent: 4634600 (1987-01-01), Shimizu et al.
patent: 4678539 (1987-07-01), Tomita et al.
patent: 4715941 (1987-12-01), Jones et al.
patent: 4790883 (1988-12-01), Sichanugrist et al.
patent: 4792670 (1988-12-01), Fukada et al.

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