Oxime sulfonates containing reactive groups

Details Oxime sulfonates containing reactive groups Oxime sulfonates containing reactive groups

1986-04-11

1988-04-05

Shippen, Michael L.

Organic compounds -- part of the class 532-570 series

Organic compounds

Carboxylic acid esters

544146, 544152, 544159, 546206, 546212, 546213, 546214, 546226, 548517, 548527, 548546, 549 60, 549 72, 549 75, 549 76, 549488, 549491, 549496, 549551, 549552, 558 7, 558 48, 558 49, 558 51, 558 52, 558 55, 558 56, 558 57, 558 58, 560 10, 560 12, 560118, 560125, 560139, 560145, 560149, 560151, 560220, 560221, 560222, 560355, 560358, 560330, 562427, 562428, 562430, 562500, 562507, 562556, 564154, 564162, 564191, 564192, 564194, 564197, 564198, 564204, 564207, 564208, 564254, 260543R, 260544L, 260544D, 26054

Patent

active

047360550

ABSTRACT:
Oxime sulfonates of formula I ##STR1## wherein Y is a polymerizable unsaturated group or epoxide group or an --OH, --NHR.sup.5, --COOH, COOR.sup.6, --COCl, --CH.sub.2 Hal, --SO.sub.2 Cl or --NCO group, Z is an (x+y)-valent connecting member, R.sup.1 and R.sup.2 are monovalent organic radicals, m is 0 or 1, x is 1 or 2 and y is 1 or 2, can be converted into polymers which can be thermally or photochemically dissociated to form free sulfonic acid groups. Said polymers can therefore be used as photoresists which can be developed with aqueous alkalis.

REFERENCES:
patent: 3497554 (1970-02-01), Remers
patent: 3983246 (1976-09-01), Gibbons
patent: 4017652 (1977-04-01), Gruber
patent: 4026705 (1977-05-01), Crivello et al.
patent: 4289865 (1981-09-01), Wilson et al.
patent: 4351935 (1982-09-01), Reesink et al.
patent: 4353787 (1982-10-01), Alexander et al.
patent: 4504372 (1985-03-01), Kirchmayr et al.
patent: 4540598 (1985-09-01), Berner et al.
Organic Synthesis, 59, 95 (1979).

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