Active solid-state devices (e.g. – transistors – solid-state diode – With means to control surface effects – Insulating coating
Patent
1991-04-29
1993-08-31
Carroll, J.
Active solid-state devices (e.g., transistors, solid-state diode
With means to control surface effects
Insulating coating
257192, 257197, 257289, 257370, 257410, 257411, 257565, 257651, H01L 2978, H01L 2920, H01L 2702, H01L 2934
Patent
active
052412148
ABSTRACT:
A process and resultant devices is described for forming MOSFET, CMOS and BICMOS devices of Group IV alloys, in particular Si.sub.x Ge.sub.1-x wherein 0<x<1, using ion beam oxidation (IBO) or ion beam nitridation (IBN) by CIMD to form insulators of the Group IV alloys.
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Hellman Olof C.
Herbots Nicole
Vancauwenberghe Olivier P. J.
Carroll J.
Massachusetts Institute of Technology
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