Radiant energy – Invisible radiant energy responsive electric signalling – Infrared responsive
Reexamination Certificate
2007-07-31
2007-07-31
Hannaher, Constantine (Department: 2884)
Radiant energy
Invisible radiant energy responsive electric signalling
Infrared responsive
Reexamination Certificate
active
10953700
ABSTRACT:
The present invention relates to an oxide thin film for a bolometer-type uncooled infrared detector having high sensitivity. An amorphous vanadium tungsten oxide (V—W—Ox), i.e. a tungsten-doped vanadium oxide, is provided as an oxide film for a bolometer application. An oxide for bolometer having characteristics of low resistance of 5 to 200 k Ω and variable TCR between −1.5 and −4.1%/° C. can be obtained by an oxidation of vanadium-tungsten metal film at a low temperature around 300° C., with changing a tungsten content and oxidation time. And a reproducible thin film can be fabricated by low price equipment for thin film deposition, without expensive ion beam or laser apparatus. Accordingly, an oxide for bolometer having characteristics of resistance lower than 100 kΩ and TCR higher than −3%/° C. can be obtained with reproducibility, whereby an uncooled-type infrared detector having high sensitivity can be fabricated.
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Jin et al. “Growth abd characterization of epitaxial films of tungsten-doped vanadium oxides on sapphire (110) by reactive magnetron sputtering”, J.Vac.Sci.Technol.A 17(4), Jul./Aug. 1999.
Soltani et al. “Effects of Ti-W codoping on the optical and electrical switching of vanadium dioxide thin films grown by a reactive pulsed laser deposition”, Applied Physics Letters, vol. 85, No. 11, pp. 1958-1960, 2004.
Soltani et al. “Optical switching of vanadium dioxide thin films deposited by reactive pulsed laser deposition”, Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, vol. 22, No. 3, pp. 859-864, May 2004.
Sung Moon “Novel Infrared Absorbing Material Coupled Uncooled Microbolometer”, IEEE, 2004.
Han Yong-Hee
Moon Sung
Shin Hyun-Joon
Hannaher Constantine
Harness Dickey & Pierce PLC
Korea Institute of Science and Technology
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