Superconductor technology: apparatus – material – process – High temperature devices – systems – apparatus – com- ponents,... – Josephson junction – per se or josephson junction with only...
Patent
1994-04-20
1996-04-02
Ryan, Patrick J.
Superconductor technology: apparatus, material, process
High temperature devices, systems, apparatus, com- ponents,...
Josephson junction, per se or josephson junction with only...
505237, 505234, 505191, 428688, 428209, 257 35, B32B 900
Patent
active
055040586
ABSTRACT:
In a method of manufacturing a superconducting device which has a first thin film of oxide superconductor material formed on a substrate and a second thin film formed on the first thin film of oxide superconductor material, after the second thin film is deposited on the first thin film of oxide superconductor material, a multi-layer structure formed of the first and second thin films is patterned so that a side surface of the first thin film is exposed. In this condition, the whole of the substrate is heated in an O.sub.2 atmosphere or in an O.sub.3 atmosphere so that oxygen is entrapped into the first thin film of oxide superconductor material. Thereafter, the patterned multi-layer structure is preferably covered with a protection coating.
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Iiyama Michitomo
Saitoh Mitsuchika
Tanaka Sou
Jewik Patrick
Ryan Patrick J.
Sumitomo Electric Industries Ltd.
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