Compositions – Electrically conductive or emissive compositions – Metal compound containing
Reexamination Certificate
2008-03-25
2008-03-25
Kopec, Mark (Department: 1796)
Compositions
Electrically conductive or emissive compositions
Metal compound containing
C204S192150, C204S192290
Reexamination Certificate
active
11599109
ABSTRACT:
An oxide sintered body for sputtering target is provided wherein the main component is indium oxide, and it contains titanium such that the atomic ratio of Ti/In is 0.003 to 0.120, and the specific resistance is 1 kΩm or less.
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John L. Vossen. RF Sputtered Transparent Conductors The System In2O3-SnO2. RCA Review, vol. 32 Jun. 1971 pp. 289-296.
Mirozova et al. “Physicochemical study of a saturated solid solutionb in the indium oxide (In-2O3)-titanium dioxide system . . . ” Zhurnal Prikladnoi Khimii (Russian) 65(9), 1992, 2138-40.
Campet et al. “The Electronic Effect of Titanium (4+) and germanium (4+) dopings upon the physical properties of indium (III) oxide . . . ” Mat. Sci and Eng, B B19(3), 285-9 (1993).
Abe Yoshiyuki
Ishiyama Noriko
Ohara Go
Kopec Mark
Sumitomo Metal & Mining Co., Ltd.
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