Compositions – Electrically conductive or emissive compositions – Metal compound containing
Reexamination Certificate
2008-03-25
2008-03-25
Kopec, Mark (Department: 1796)
Compositions
Electrically conductive or emissive compositions
Metal compound containing
C204S192150, C204S192290
Reexamination Certificate
active
07347958
ABSTRACT:
An oxide sintered body for sputtering target is provided wherein the main component is indium oxide, and it contains titanium such that the atomic ratio of Ti/In is 0.003 to 0.120, and the specific resistance is 1 kΩm or less.
REFERENCES:
patent: 59-204625 (1984-11-01), None
patent: 7-054132 (1995-02-01), None
patent: 7-54132 (1995-02-01), None
patent: 9-209134 (1997-08-01), None
patent: 2003-324825 (2003-11-01), None
Japan Society for the Promotion of Science Committee No. 166. on Transparent Oxide Optical and Electrical Materials. Technology OF Transparent Conducting Films. 1999.
John L. Vossen. RF Sputtered Transparent Conductors The System In2O3-SnO2. RCA Review, vol. 32 Jun. 1971 pp. 289-296.
Mirozova et al. “Physicochemical study of a saturated solid solutionb in the indium oxide (In-2O3)-titanium dioxide system . . . ” Zhurnal Prikladnoi Khimii (Russian) 65(9), 1992, 2138-40.
Campet et al. “The Electronic Effect of Titanium (4+) and germanium (4+) dopings upon the physical properties of indium (III) oxide . . . ” Mat. Sci and Eng, B B19(3), 285-9 (1993).
Abe Yoshiyuki
Ishiyama Noriko
Ohara Go
Katten Muchin & Rosenman LLP
Kopec Mark
Sumitomo Metal & Mining Co., Ltd.
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