Oxide sintered body

Compositions – Electrically conductive or emissive compositions – Metal compound containing

Reexamination Certificate

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C252S520100, C204S192150

Reexamination Certificate

active

07569167

ABSTRACT:
An oxide sintered body is composed mainly of indium and containing tungsten, has a resistivity of no more than 1 kΩcm. The tungsten content in terms of the W/In atomic ratio is preferably at least 0.001 and no more than 0.17. The oxide sintered body comprise mainly a bixbyite structure indium oxide crystal phase containing tungsten in a solid solution and/or an indium tungstate compound crystal phase, with no tungsten oxide crystal phase present, whereby an oxide sintered body for use as a sputtering target is provided, for an oxide based transparent conductive film with low resistance and excellent transmission characteristics for the infrared light region.

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U.S. Appl. No. 10/445,708, filed May 27, 2003, Abe.
“Transparent Conductive Film Technology”, OHM Co., 1999; p. 82.

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