Stock material or miscellaneous articles – Composite – Of inorganic material
Patent
1994-05-26
1997-03-04
Kiliman, Leszek
Stock material or miscellaneous articles
Composite
Of inorganic material
428694SC, 428694GT, 428694TS, 428694T, 428694ST, 428694MM, 428694TM, 428692, 428702, 428900, 2041921, 20419211, 20419214, 20419215, 2041922, 20419226, 427128, 427595, 427599, 252 6251R, 252 6256, 252 6251C, 369 13, G11B 566, C23C 1400, B05D 512
Patent
active
056077815
ABSTRACT:
An oxide film having, for example, a spinel structure is deposited on a substrate, and ions of an inert gas such as He, Ar, Ne, Kr, or Xe, oxygen gas ions, or metal ion of a film constituting element are radiated onto the film during deposition, thereby to obtain an oxide thin film in which a specific crystal direction is oriented.
REFERENCES:
patent: 3607390 (1971-09-01), Comstock et al.
patent: 4586092 (1986-04-01), Martens et al.
patent: 4839226 (1989-06-01), Sawada et al.
patent: 4975324 (1990-12-01), Torii et al.
Journal of the Japan Society of Powder and Powder Metallurgy vol. 35, No. 3, p. 197; H. Torii et al.; 1988 (English Abstract Only).
Journal of the Magnetic Society of Japan vol. 12, No. 2, p. 339; E. Fujii et al.; 1988 (English Abstract Only).
Journal of the Japan Society of Powder and Powder Metallurgy vol. 35, No. 3, p. 202; E. Fujii et al.; 1988 (English Abstract Only).
Hashimoto Susumu
Inomata Koichiro
Okuno Shiho
Kabushiki Kaisha Toshiba
Kiliman Leszek
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