Stock material or miscellaneous articles – Composite – Of silicon containing
Reexamination Certificate
2005-05-24
2005-05-24
Stein, Stephen (Department: 1775)
Stock material or miscellaneous articles
Composite
Of silicon containing
C428S336000, C428S450000, C428S469000, C428S697000, C428S699000, C428S701000, C428S702000, C428S704000
Reexamination Certificate
active
06896969
ABSTRACT:
A metal oxide layer may made more highly oxidized by exposing the layer to sulfur trioxide. The leakage current of the layer may thereby be decreased, providing a capacitor containing such a layer with improved performance properties. The capacitor may be incorporated into a dynamic random access memory cell or other structure useful in the semiconductor or other industry.
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Micro)n Technology, Inc.
Stein Stephen
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