Oxidation/diffusion processing apparatus

Details Oxidation/diffusion processing apparatus Oxidation/diffusion processing apparatus

1993-01-29

1994-07-19

Yuen, Henry C.

Heating

Work chamber having heating means

Having means by which work is progressed or moved mechanically

432205, 432241, 432253, F27B 904

Patent

active

053303520

ABSTRACT:
An oxidation/diffusion processing apparatus includes a processing vessel, arranged such that a longitudinal direction is vertical, for storing a plurality of target objects to be processed, a heater arranged around the processing vessel, for heating the interior of the processing vessel, a process gas supply mechanism for supplying a process gas from the lower portion of the processing vessel into the processing vessel, and an exhaust mechanism for exhausting a processed exhaust gas from the upper portion of the processing vessel. The process gas is supplied to the target objects heated to a predetermined temperature by the heater to perform oxidation/diffusion processing to the target objects.

REFERENCES:
patent: 4943235 (1990-07-01), Nakao et al.
patent: 4950870 (1990-08-01), Mitsuhashi et al.
patent: 5088922 (1992-02-01), Kakizaki et al.
patent: 5207573 (1993-05-01), Miyagi et al.
patent: 5207578 (1993-05-01), Sakata
patent: 5226812 (1993-07-01), Sakata

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