Overpressure-protected, polysilicon, capacitive differential pre

Details Overpressure-protected, polysilicon, capacitive differential pre Overpressure-protected, polysilicon, capacitive differential pre

1992-05-12

1994-06-28

Chilcot, Jr., Richard E.

Measuring and testing

Fluid pressure gauge

Diaphragm

73724, 3612833, 29 2541, G01L 912, G01L 1302

Patent

active

053236564

ABSTRACT:
A capacitive differential pressure sensing device with pressure overrange protection and a method of making the same are described. The device employs a doped polysilicon diaphragm overlying a cavity in a doped single crystal silicon wafer having a port extending into the cavity from the opposite side. The cavity floor serves as an overrange protector.

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European Search Report mailed Sep. 23, 1993.
Chau et al. "Scaling Limits in Batch-Fabricated Silicon Pressure Sensors" IEEE Transactions on Electron Devices 1987, vol. ED-34, No. 4, pp. 850-858.

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