Measuring and testing – Fluid pressure gauge – Diaphragm
Patent
1991-03-28
1993-06-22
Woodiel, Donald O.
Measuring and testing
Fluid pressure gauge
Diaphragm
296211, 73727, G01L 906
Patent
active
052208389
ABSTRACT:
An overpressure-protected, differential pressure sensor (37) is formed by depositing diaphragm material (24) over a cavity (23) formed and filled with sacrificial material (22) into a front surface of a substrate. The sacrificial material (22) is then removed to create a free diaphragm. The floor of the cavity (23) defines a first pressure stop to limit the deflection of the diaphragm in response to pressure applied to the top of the diaphragm. A port (33) is created to allow pressure to be applied to the bottom side of the diaphragm (24). An optional second pressure stop, which limits the deflection of the diaphragm in response to pressure applied to the bottom side of the diaphragm, is formed by bonding a cap (35) to standoffs (34) placed around the top of the diaphragm. The standoffs are spaced to allow pressure to be applied to the top of the diaphragm.
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Chau Kevin H.-L.
Dahrooge Gary A.
Fung Clifford D.
Harris P. Rowe
Panagou John G.
Liepmann W. Hugo
Morris Jules Jay
Sheldon Michael L.
The Foxboro Company
Woodiel Donald O.
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