Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Patent
1983-04-28
1985-08-27
Levy, Stewart J.
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
With rotor
29574, 324 65R, G01R 2714, H01L 2166
Patent
active
045381054
ABSTRACT:
The present invention is directed to an improved test wafer for testing the overlay alignment of a second level pattern over a first level pattern for testing lithographic equipment used in making microcircuits, which includes four conductors with circuitry provided for each conductor measuring the conductance thereof, the conductors being constructed and arranged so that the conductance of the first conductor relative to the second conductor, and the conductance of the third conductor relative to the fourth conductor is indicative of the offset of said first level pattern with respect to said second level pattern. In another form of the invention four additional conductors are provided with circuitry provided for each conductor for measuring the conductance thereof, the additional conductors being constructed and arranged so that the relative conductance thereof is indicative of the offset of said first level pattern with respect to said second level pattern in a direction orthogonal with respect to the offset of the first group of four conductors.
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Baker Stephen M.
Grimes E. T.
Levy Stewart J.
Masselle F. L.
Murphy Thomas P.
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