Radiant energy – Means to align or position an object relative to a source or...
Patent
1995-04-25
1999-07-13
Berman, Jack I.
Radiant energy
Means to align or position an object relative to a source or...
356401, G01B 1100
Patent
active
059230410
ABSTRACT:
Imaging instruments for inspecting products, such as semiconductor chips, are calibrated by providing a reference test structure having features which can be located by optical measurements not subject to tool-induced shift and wafer-induced shift experienced by the imaging instrument, thereby enbabling self correction of the imaging instrument. The reference test structure, which has a plurality of target units formed therein, is first qualified using the optical measurements, and is then used to calibrate the imaging instrument. The optical measurements may be made by a supplementary alternative imaging-sensor means which can be integrated into existing imaging instrument architecture. A series of test structure elements may be fabricated with one component of each being spaced at progressively greater distances from an arbitrary baseline, such that a zero overlay element may be identified by the alternative imaging sensor means.
REFERENCES:
patent: 5017514 (1991-05-01), Nishimoto
patent: 5280437 (1994-01-01), Corliss
patent: 5602492 (1997-02-01), Cresswell et al.
patent: 5617340 (1997-04-01), Cresswell et al.
Allen Richard A.
Cresswell Michael William
Linholm Loren Wendell
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