Overlay registration control system and method employing...

Details Overlay registration control system and method employing... Overlay registration control system and method employing...

2005-12-20

2005-12-20

Paladini, Albert W. (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Article handling

C430S030000

Reexamination Certificate

active

06978191

ABSTRACT:
A method for fabricating a microelectronic product and a system for fabricating the microelectronic product each employ an in-line automatic photolithographic processing and overlay registration measurement for a pair of pilot lots of a new product order, prior to in-line automatic processing of an additional new product order lot within a photolithographic process tool. The method and the system provide for efficient production of new product order lots, absent need for an independent pilot lot qualification method or system.

REFERENCES:
patent: 5923041 (1999-07-01), Cresswell et al.
patent: 6233494 (2001-05-01), Aoyagi
patent: 6405096 (2002-06-01), Toprac et al.
patent: 6737208 (2004-05-01), Bode et al.
patent: 6788996 (2004-09-01), Shimizu

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