Overlay error measurement using fourier optics

Details Overlay error measurement using fourier optics Overlay error measurement using fourier optics

2007-05-29

2010-02-02

Lauchman, L. G (Department: 2877)

Optics: measuring and testing

By alignment in lateral direction

With registration indicia

C356S622000, C356S620000, C356S400000

Reexamination Certificate

active

07656529

ABSTRACT:
The present invention discloses an overlay alignment measurement apparatus and method. The overlay target is periodic and is illuminated by coherent radiation; a Fourier transform lens optically computes the Fourier transform of the target. Analysis of the spatial frequencies at the Fourier plane yields overlay alignment information.

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