Overhanging separator for self-defining stacked capacitor

Details Overhanging separator for self-defining stacked capacitor Overhanging separator for self-defining stacked capacitor

1997-05-29

1998-08-18

Ledynh, Bot L.

Electricity: electrical systems and devices

Electrostatic capacitors

Fixed capacitor

361311, 361312, 361313, 3613014, 257303, 257306, H01G 406, H01G 420, H01G 410

Patent

active

057965730

ABSTRACT:
An overhanging separator structure with a post projecting from a surface which may be a substrate, an underlying layer on the surface, and a separator layer on the underlying layer, with the separator layer overhanging the underlying layer. A discontinuous film is then formed in a single process step having a first portion on the separator layer and a second portion on the post, the discontinuity caused by the overhanging separator layer. The structure is made into a stacked capacitor with the second (post) portion of the discontinuous film being the bottom electrode, by forming a continuous dielectric layer on the bottom electrode and a continuous top electrode layer on the dielectric layer.

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