Overhanging separator for self-defining discontinuous film

Details Overhanging separator for self-defining discontinuous film Overhanging separator for self-defining discontinuous film

1997-05-29

2000-11-28

Chaudhuri, Olik

Semiconductor device manufacturing: process

Making passive device

Stacked capacitor

438387, 438399, 257300, 257303, 257532, H01L 2120

Patent

active

061534919

ABSTRACT:
A discontinuous film structure on a surface which may be a substrate, with an underlying layer on the surface having a first opening formed therein, a separator layer on the underlying layer having a second opening formed therein, and the second opening overlying the first opening such that the separator layer overhangs the underlying layer. A discontinuous-as-deposited film is formed on the separator layer, with the discontinuity substantially in register with the second opening. The structure is made into a stacked capacitor with the discontinuous film being the bottom electrode, by forming a continuous dielectric layer on the bottom electrode and a continuous top electrode layer on the dielectric layer.

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