Outside chamber sealing roller system for surface treatment gas

Details Outside chamber sealing roller system for surface treatment gas Outside chamber sealing roller system for surface treatment gas

1998-08-28

2000-04-25

Bueker, Richard

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With microwave gas energizing means

42218605, 118719, 118723E, C23F 102

Patent

active

060540184

ABSTRACT:
A surface treatment gas reactor features a roller assembly for transporting a bi-dimensional material into and out of a gas reaction chamber. Either a four-roller or a three-roller assembly may be employed. The roller assembly is configured such that the surface area of the rollers in the roller assembly which are exposed to the interior of the reaction chamber is minimized. Thus, most of the rollers in the roller assembly are located outside of the reaction chamber. Active volume of the reaction chamber is reduced to a minimum by a large freely rotating roller and a specially shaped support piece mounted in the reaction chamber to occupy most of the dead volume in the reaction chamber. A bi-dimensional substrate to be treated is transported by the roller system and the freely rotating roller through a plasma generated in the reaction chamber by electrodes mounted in a removable electrode holder within the chamber. Axial ends of the rollers in the roller system are sealed with minimum surface contact. A gas channeling mechanism is employed to avoid displacement of the bi-dimensional substrate being treated during evacuation of the reaction chamber.

REFERENCES:
patent: 5114770 (1992-05-01), Echizen et al.
patent: 5130170 (1992-07-01), Kanai et al.
patent: 5314539 (1994-05-01), Brown et al.
patent: 5397395 (1995-03-01), Sano et al.
patent: 5458856 (1995-10-01), Marie et al.
patent: 5523124 (1996-06-01), Slootman et al.
patent: 5527629 (1996-06-01), Gastiger et al.
patent: 5576076 (1996-11-01), Slootman et al.
K.W. Gerstenberg, "A reactor for plasma polymerization on polymer films", Materials Science and Engineering, A139, pp. 110-119, 1991.
J.C. Rostaing, et al., "Silicon-based, protective transparent multilayer coatings deposited at high rate on optical polymers by dual-mode MW/r.f. PECVD", Thin Film Solids, 236, pp. 58-63, 1993.
J.C. Rostaing, et al., "Highly homogeneous silica coatings for optical and protective applications deposited by PECVD at room temperature in a planar uniform distributed electron cyclotron resonance plasma reactor", Thin Film Solids 270, pp. 49-54, 1995.
E. Prinz, et al., Aldyne--A new high-quality, stable surface treatment for plastic films, paper, and metal foils, Flexo & Gravure International, pp. 64-66, Mar., 1996.
RK Print-Coat Instruments Ltd., Rotary Koater product information.
S.D. Lee, et al., "Surface Modification of Polymeric Films under Reactive-Gas Corona-Discharge Conditions", overhead slides presented Jun., 1997.

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