Oscillator using H-shaped single crystal silicon vibrator

Details Oscillator using H-shaped single crystal silicon vibrator Oscillator using H-shaped single crystal silicon vibrator

1988-09-16

1990-05-15

Grimm, Siegfried H.

Oscillators

Electromechanical resonator

Vibrating reed or string type

310 25, 318128, 331 65, 331116FE, H03B 530

Patent

active

049261436

ABSTRACT:
A vibrating type transducer wherein an H-shaped vibrator, formed integrally with a silicon substrate and having a hollow chamber provided therearound, is kept self oscillating at its natural resonance frequency together with an amplifier. A physical quantity, such as force, pressure, differential pressure, or the like, which is applied to the silicon substrate is detected by a change in the natural frequency arising at the vibrator corresponding to the physical quantity. The invention also includes a method for manufacturing such transducer using a semiconductor technique, including steps for keeping a vacuum internally in the hollow chamber, imparting an initial tension to the vibrator, and then operating the amplifier to have stable self oscillation.

REFERENCES:
patent: 4381672 (1983-05-01), O'Connor et al.
patent: 4721925 (1988-01-01), Farace et al.

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