Oscillator device, optical deflector and optical instrument...

Details Oscillator device, optical deflector and optical instrument... Oscillator device, optical deflector and optical instrument...

2008-07-22

2010-12-21

Phan, James (Department: 2872)

Optical: systems and elements

Deflection using a moving element

By moving a reflective element

C267S154000, C359S224200

Reexamination Certificate

active

07855820

ABSTRACT:
An oscillator device includes a supporting base plate, a torsion spring, and a movable member, wherein the movable member is supported by the torsion spring, for torsional oscillation relative to the supporting base plate about a torsional axis, wherein the torsion spring has an X-shaped section being perpendicular to the torsional axis and a top surface and a bottom surface each being defined by a (100)-equivalent surface of monocrystal silicon, and wherein a distance L1connecting bottoms of concavities formed at the top surface and bottom surface, respectively, and a distance L2connecting bottoms of concavities defined at side surfaces of the X-shaped torsion spring as well as a rate of change αi of inertia moment of the movable member around the torsion axis, with a change of a thickness t of the supporting base plate, satisfy the following relation: L1/L2=C1−Exp{C2−(αi+C3)}+C4−αi+C5where C1=5.0*10^=−1, C2=−4.4, C3=4.6*10^−2, C4=−6.0*10^−1 and 1.5<C5<1.7.

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