Oscillating micromirror with bimorph actuation

Details Oscillating micromirror with bimorph actuation Oscillating micromirror with bimorph actuation

2007-03-13

2007-03-13

Dang, Hung Xuan (Department: 2873)

Optical: systems and elements

Deflection using a moving element

By moving a reflective element

C359S321000

Reexamination Certificate

active

10937182

ABSTRACT:
The present invention relates to a micromirror comprising a mobile part with a reflecting area, a fixed part, two torsion arms originating from the mobile part materializing an axis about which the mobile part can oscillate, this axis being approximately parallel to a principal plane of the mobile part and passing through the mobile part while being offset from the center of mass of the mobile part, each torsion arm having one end connected to the fixed part through bimorph actuation means. The bimorph actuation means comprise a solid stack with deposited or add-on layers for each torsion arm, including a part made of an active material capable of changing volume and/or shape under the effect of an excitation, co-operating with a passive flexible structure.

REFERENCES:
patent: 5969465 (1999-10-01), Neukermans et al.
patent: 6198565 (2001-03-01), Iseki et al.
patent: 2002/0020810 (2002-02-01), Wine et al.
patent: 2002/0021860 (2002-02-01), Ruan et al.
patent: 2002/0118472 (2002-08-01), Hill
Yamada et al., “A Novel Asymmetric Silicon Micro-Mirror for Optical Beam Scanning Display”, 1998, IEEE, pp. 110-115.
Brissaud, Michael, “Modelling of a cantilever non-symmetric piezoelectric bimorph”, Jul. 9, 2003, pp. 832-844.

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