Oscillating micro-mechanical sensor of angular velocity

Details Oscillating micro-mechanical sensor of angular velocity Oscillating micro-mechanical sensor of angular velocity

2005-12-28

2008-11-25

Williams, Hezron E. (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Angular rate using gyroscopic or coriolis effect

C073S504020, C073S504030, C073S504080, C073S514150, C073S514210

Reexamination Certificate

active

07454971

ABSTRACT:
The invention relates to measuring devices used in measuring angular velocity, and, more specifically, to oscillating micro-mechanical sensors of angular velocity. In the sensor of angular velocity according to the present invention seismic masses (1), (2), (36), (37) are connected to support areas by means of springs or by means of springs and stiff auxiliary structures, which give the masses (1), (2), (36), (37) a degree of freedom in relation to an axis of rotation perpendicular to the plane of the wafer formed by the masses, and in relation to at least one axis of rotation parallel to the plane of the wafer. The structure of the sensor of angular velocity according to the present invention enables reliable and efficient measuring particularly in compact oscillating micro-mechanical sensors of angular velocity.

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