Oscillating element, manufacturing method of oscillating...

Details Oscillating element, manufacturing method of oscillating... Oscillating element, manufacturing method of oscillating...

2008-09-29

2011-11-22

Phan, James (Department: 2872)

Optical: systems and elements

Deflection using a moving element

Using a periodically moving element

C359S213100, C359S214100, C359S900000, C310S311000

Reexamination Certificate

active

08064117

ABSTRACT:
An oscillating element which can improve the adhesiveness thereof with an actuator is disclosed. In an oscillating element which includes a substrate which is configured to support an oscillation portion in an oscillating manner, and a driving layer which is configured to oscillate the oscillation portion, the driving layer including an adhesive layer formed on a substrate side thereof, an intermediate layer is positioned between the substrate and the driving layer. The intermediate layer is made of a material which allows surface activation bonding with the substrate, and the surface roughness of the intermediate layer on the adhesive layer side is set coarser than the surface roughness of the intermediate layer on the substrate side thus allowing the intermediate layer to easily acquire an anchoring effect with the adhesive layer.

REFERENCES:
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patent: 7596840 (2009-10-01), Iwashita et al.
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patent: A-2006-060680 (2006-03-01), None
Office Action dated Aug. 30, 2011 issued in Japanese Patent Application No. JP-2006-095527 (with translation).

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