Oscillating device, light deflector, and image forming...

Details Oscillating device, light deflector, and image forming... Oscillating device, light deflector, and image forming...

2008-07-17

2011-12-20

Doak, Jennifer L. (Department: 2872)

Optical: systems and elements

Deflection using a moving element

By moving a reflective element

C257SE21599

Reexamination Certificate

active

08081366

ABSTRACT:
An oscillating device includes a supporting portion, a movable portion, a torsion spring that supports the movable portion with respect to the supporting portion so that the movable portion is capable of torsionally vibrating around a torsion axis, and a driving unit that vibrates the movable portion. The torsion spring is formed of single-crystal silicon, and a crystal orientation parallel to the torsion axis of the torsion spring is a [111] orientation.

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patent: 2009/0034038 (2009-02-01), Torashima et al.
patent: 1 275 997 (2003-01-01), None
patent: 2003-019700 (2003-01-01), None
Translation of JP 2003019700 (Jan. 21, 2003).
U.S. Appl. No. 12/174,880, filed Jul. 17, 2008.
Madou, Marc J., “Fundamentals of Microfabrication: The Science of Miniaturization,” Second Edition, CRC Press, 2002, pp. 185-195.

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