Orthogonal high accuracy microscope stage

Details Orthogonal high accuracy microscope stage Orthogonal high accuracy microscope stage

1996-10-16

1998-09-22

Henry, Jon W.

Optical: systems and elements

Compound lens system

Microscope

359393, 108137, 269 71, 269 73, G02B 2126, B23Q 128

Patent

active

058123105

ABSTRACT:
A high accuracy, orthogonal motion stage for microscopes and the like uses three frames for orthogonal motion. The lower most frame has provided thereon a series of downwardly depending ramps. An actuator plate having correspondingly positioned, upwardly directed ramps is translated with respect to the lower most frame to raise and lower the frames.

REFERENCES:
patent: 4193317 (1980-03-01), Oono et al.
patent: 4234175 (1980-11-01), Sato et al.
patent: 4422002 (1983-12-01), Binnig et al.
patent: 4948330 (1990-08-01), Nomura et al.
patent: 5022619 (1991-06-01), Mamada
patent: 5524502 (1996-06-01), Osanai
"XYZ Travelling Support", IBM Tech. Dis. Bulletin, vol. 29, No. 8,p.3526 (359/393) , Jan. 1987.
Applied Precision, Inc., Z-Axis Stage for the PRVX, Sold Jul. 6, 1995.

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