Oriented conductive film and process for preparing the same

Details Oriented conductive film and process for preparing the same Oriented conductive film and process for preparing the same

1995-05-11

1997-07-22

Utech, Benjamin

Fishing, trapping, and vermin destroying

427100, 4271263, 4273762, 4274193, H01L 2102

Patent

active

056503628

ABSTRACT:
An oriented conductive thin film useful as a thin film electrode or a thin film resistor may be made by coating a single crystal substrate with a metal oxide precursor solution containing an organometallic compound, and subjecting the coating layer to thermal decomposition, followed by annealing the coated substrate. The result is an epitaxial or oriented perovskite ABO.sub.3 structure oxide conductive thin film. A further layer of an epitaxial or oriented ABO.sub.3 type ferroelectric thin film can be formed on the conductive thin film.

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Lee et al., "Effects of Crystalline Quality and Electrode Material on Fatigue in Pb(Zr,Ti)O.sub.3 Thin Film Capacitors," Appl. Phys. Lett. 63(1) (1993) pp. 27-29.

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